Wafer Bow buy pr backlinks and Wafer Nervousness Measurement
KLA-Tencor Provides Production-Ready 300 mm Thin-Film Metrology buy high pr domains Equipment With pr domainsgov backlinks Talents.
SAN JOSE, Calif., June 7 /PRNewswire/ --
KLA-Tencor Corporation. (Nasdaq: KLAC) this era uncovered a brand new selection for its ASET-F5x thin-film measurement equipment which offers wafer bow and wafer nervousness measurements on 300 mm wafers. With these talents built-into a unmarried platform, clients no more really have to consume two divide items per process module to take these critical measurements. As a consequence, chipmakers could cut back their all in all funds expenses and free up valuable floor area within the fab, whilst at the equivalent time intensifying their 300 mm yields by making use of the advanced talents of KLA-Tencor's latest-generation thin-film metrology system.
Wafer nervousness is actually a key concern for chipmakers since they conversion to 300 mm production because 300 mm wafers could bow, or bend, more than 2 times as often as 200 mm wafers given the equivalent motion picture density and material properties. This bowing creates nervousness on the wafer, and enhances the wafer's susceptibility to motion picture breaking and de-lamination, that could detrimentally affect yields. Wafer nervousness may additionally affect up coming procedures if left unchecked-resulting in more yield deficits.
"KLA-Tencor's ASET-F5x system with new wafer bow and wafer nervousness measurement expertise offers the superior measurement sense of balance and tool-to-tool matching that allows us to meet our 300 mm production requisites," stated Phil Hecker, slim motion picture segment manager for Texas Instruments' DMOS 6 300 mm queue. "The merger of skinny and nervousness metrology on one platform also improves all in all tool efficacy and system suppleness."
The fresh Wafer Bow Wafer Nervousness selection would allow clients to utilise the equivalent formulation for motion picture density and nervousness measurements through out setup-significantly progressing system exploitation and lessening time to results. The fresh selection is principally useful in manipulation the chemical vapor deposition (CVD) process, where wafer nervousness will cause such imperfections as aluminum stress-induced voids, buy high pr domains nitride and oxide passivation breaking, stress-induced dislocations in polymer, electrical try on yield degradation, tungsten silicide breaking, motion picture breaking, motion picture de-lamination, wafer warpage, hillock creation, electrical effects, and die breaking.
"The fresh Wafer Bow Wafer Nervousness selection on our ASET-F5x system is created to support our clients assure that every one of their process modules remnants within its specified fortitude," stated Sergio Edelstein, vice chairman and general manager of KLA-Tencor's Motion picture and Surface Invention Department. "The activity we've earned from supplying nervousness metrology resolutions for more than 2 decades puts us in an individual position to incorporate this expertise into our widely-adopted thin-film measurement tool-resulting in a production-ready nervousness and thin-film metrology solution which offers the hottest precision and tool-to-tool matching in the commercial."
. It hands over the wanted multi-variable density process control necessary for all see-through movies, consisting of the most complicated motion picture stacks which integrate anti-reflective layers (ARLs) and low-k dielectric movies. KLA-Tencor nowdays leads the UV-SE superstore with systems in use by 18 of the leading 20 universal semiconductor producers.
ASET-F5x systems with KLA-Tencor's new Wafer Bow Wafer Nervousness selection have actually been installed in three 300 mm pilot queues. The fresh selection is available now for delivery to clients.
Visit KLA-Tencor's booth, #426, at SEMICON West 2001 at the Moscone Centre in San Francisco, July 16-18, to find out more about this new selection.
About KLA-Tencor: KLA-Tencor 's the world supervisor in yield leadership and process control resolutions for semiconductor manufacture and interrelated industries. Headquartered in San Jose, Calif., the business enterprise has sales and service offices around the globe. An S&P 500 business enterprise, KLA-Tencor is dealt out on the Nasdaq Countrywide Superstore beneath the emblem KLAC..
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